Authors: Kenneth C. Johnson
The accuracy of precision diamond turning is limited by stage interferometers, which do not provide a direct measure of the cutting tool proximity to the workpiece or the depth of cut. When making shallow trim cuts on a previously machined part, accuracy can be greatly increased by using a proximity or depth sensor on or close to the tool for position servo control. Further improvements in both surface form and finish can be made by machining a pattern into a sacrificial layer, which is then transferred into the workpiece by a selective etch process. These techniques are particularly useful for EUV and X-ray mirrors and gratings.
Comments: 4 Pages.
[v1] 2018-09-21 02:46:46
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