The fitting relations for Vickers’s indentation for SiCN films as obtained previously. The parameter P’s are the ones which quantify the thin film hardness and substrate effect. The Variation of Hardness with thickness for different P1 values was given in our previous publication. Here we provide the variation of hardness with other parameters.
Comments: 05 Pages. Addition to a previous communication
[v1] 2016-04-23 16:45:15
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