Authors: Kenneth C. Johnson
This paper outlines a design for an EUV transmission lens comprising blazed, phase-Fresnel structures approximated by a stepped profile. The structures can be formed on both sides of a thin silicon substrate, providing many more phase levels than would be possible with one-sided lenses. An e-beam fabrication technique with nanometer-scale patterning accuracy is outlined.
Comments: 9 Pages. v2: Revised discussion of manufacturing method.
Unique-IP document downloads: 31 times
Vixra.org is a pre-print repository rather than a journal. Articles hosted may not yet have been verified by peer-review and should be treated as preliminary. In particular, anything that appears to include financial or legal advice or proposed medical treatments should be treated with due caution. Vixra.org will not be responsible for any consequences of actions that result from any form of use of any documents on this website.
Add your own feedback and questions here:
You are equally welcome to be positive or negative about any paper but please be polite. If you are being critical you must mention at least one specific error, otherwise your comment will be deleted as unhelpful.