Authors: Kenneth C. Johnson
This paper outlines a design for an EUV transmission lens comprising blazed, phase-Fresnel structures approximated by a stepped profile. The structures can be formed on both sides of a thin silicon substrate, providing many more phase levels than would be possible with one-sided lenses. An e-beam fabrication technique with nanometer-scale patterning accuracy is outlined.
Comments: 9 Pages. v2: Revised discussion of manufacturing method.
Unique-IP document downloads: 27 times
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