Establishment of Reasonable Coating Processing of Sample for Scanning Electronic Microscope(sem) Measurement of Nano Material

Authors: Kwang-Il Kim, Il-Man Pak, Tae-Min Ro

The scanning electron microscope has a high resolution, image measurement and micro-zone analysis functions, and is a powerful means in analyzing nanomaterials. However, it is very difficult to measure nanomaterials under tens of nanometers from nanomaterials with deep concave convexes, including nano powders. ㎛-grade porous nanomaterials, the image quality of the scanning electron microscope is improved by the composite coating method of C and Au. [3] Here, a reasonable sample coating process for improving the image quality in the scanning electron microscopic measurement of the nanomaterial was established.

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[v1] 2018-05-15 03:50:04

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