Theoretical Study of Amorphous Mos2 Formation Condition by DC Cathode Sputtering Evaporation

Authors: Kwangil Kim, Ilman Pak, Kwangmyong Li

ABSTRACT The deposition of MoS2solid lubricant on metal surfaces by non-acid deposition is the most widely used method in aviation and space. The MoS2 film formed by the non-acid deposition is amorphous when the temperature of the matrix is 160 ° or less, and becomes crystalline when the temperature is higher. [2] The amorphous film has a smaller friction coefficient than the crystalline film. [3] In this study, the amorphous film formation conditions of MoS2 were determined theoretically and the friction coefficient was measured in DC cathodic dep

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[v1] 2018-04-27 01:56:03

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