Classical Physics


EUV Plasma Source with IR Power Recycling

Authors: Kenneth C. Johnson

Laser power requirements for an EUV laser-produced plasma source can be reduced by using power-recycling optics to reflect plasma-scattered IR radiation back onto the plasma. Previously proposed spherical retroreflective mirrors can be used to form an inverted image of the plasma on itself, but an erect (non-inverted) image would be more tolerant of positional alignment errors. Erect-imaging optical design alternatives for power recycling are described in this paper.

Comments: 10 Pages.

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Submission history

[v1] 2016-01-01 02:07:25
[v2] 2016-01-07 02:11:53

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