Authors: Kenneth C. Johnson
Laser power requirements for an EUV laser-produced plasma source can be reduced by using power-recycling optics to reflect plasma-scattered IR radiation back onto the plasma. Previously proposed spherical retroreflective mirrors can be used to form an inverted image of the plasma on itself, but an erect (non-inverted) image would be more tolerant of positional alignment errors. Erect-imaging optical design alternatives for power recycling are described in this paper.
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