Authors: Kenneth C. Johnson
A compact and inexpensive EUV source using high harmonic generation can provide illumination for a tabletop EUV microscope, but such microscopes typically use only one of the source’s available harmonic wavelengths. This paper outlines a microscopy system that focuses multiple harmonic wavelengths onto distinct, spatially-separated focal spots on an inspection sample, which is scanned to generate multi-spectral, diffraction-limited EUV images of the sample. The system uses diffraction optics to separate the EUV harmonics and also to separate the source’s IR wavelength out of the EUV illumination.
Comments: 13 Pages.
[v1] 2015-12-22 02:31:47
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