MEMS based microcantilever is a microfabricated mostly rectangular bar shaped structure, longer as compared to width, and has a thickness much smaller than its length or width. Microfabricated silicon cantilever sensor arrays represent a powerful platform for sensing applications in physics, chemistry, material science, biology and medicine. Microcantielver senses even a few molecules or atoms. A small change in mass causes a greater displacement. It is important that due to micron size of cantilever, the cantilevers bend or displacement is due to small amount of mass but not weight. For application in biomedical diagnostics this device plays an important role in the identification of disease detection particles. In this paper we review the cantilever principle, modes of operation, transduction principle and application of cantilever as sensor. MEMS applications operate the cantilever in either a static mode of operation or a dynamic mode of operation. The concept of stress concentration region (SCR) is used to increase stress occurred in the cantilever.
Comments: 11 Pages.
[v1] 2015-04-11 08:08:04
Unique-IP document downloads: 763 times
Vixra.org is a pre-print repository rather than a journal. Articles hosted may not yet have been verified by peer-review and should be treated as preliminary. In particular, anything that appears to include financial or legal advice or proposed medical treatments should be treated with due caution. Vixra.org will not be responsible for any consequences of actions that result from any form of use of any documents on this website.
Add your own feedback and questions here:
You are equally welcome to be positive or negative about any paper but please be polite. If you are being critical you must mention at least one specific error, otherwise your comment will be deleted as unhelpful.